KxS Technologies – DCM-10
Manufacturer: KxS Technologies
Category: Liquid Monitor
Segment: Instrumentation and Automation
Industry: Semiconductor
Description
DCM-10
Inline Concentration Monitor for Critical Fab Wet Chemicals is Designed to:
- DEFINE incoming clean chemicals (SC-1, SC-2, dHF) and raw CMP slurry density.
- ACHIEVE AND ENSURE H2O2 concentration in CMP slurries for copper, tungsten and interlayer dielectric applications.
- CORRELATE etch rate ER in e.g. wafer backside poly etch HF:HNO3 and buffered oxide etch BOE.
- OPTIMIZE bath life of post-etch residue removers like EKC265™ and other solvents in wet strip tools.
Solutions
Vector’s experienced engineers and technicians can provide solutions for your tough applications.
Services
Vector CAG can help schedule you for routine maintenance, installation, start up, commissioning, training and inspections.
Training
Vector University offers courses on all products to keep your processes running safely, optimally and cost effectively.
